半导体以及某些洁净领域度对于泥浆和侵蚀性液体流速控制的需求正在被一种新型含氟聚合物（fluoropolymer）隔膜阀变得简单化，这种新型阀门来自于Parker Hannifin（派克汉尼汾）的Partek分部。

    此新型产品被称作20系列，以独特的水流通道和阀座区域为主要特点，能够以最小的压力实现流量动力最优化，增强流速，对侵蚀性介质拥有抗耐性。因此，20系列阀门在泥浆的应用中有着超出百万转的使用寿命。

    Partek的新型阀门完全符合聚合成分的SEMI-F57-0301标准，由100%超纯PTFE制成的阀身对化学品有非常好的抗腐性，同时具有一体化高精度的阀膜。

    它最初可用于1/4,1/2和1in（英寸）3种大小的截流面积,端口尺寸范围则是从1/4t到1-1/4in（英寸），它还可以提供工业标准的Parflare或Nippon Pillar S300末端连接。

    此阀门的设计非常有利于节省关键的洁净空间以及加工空间。例如，1/4英寸版本的阀门的阀身大小仅为1.5x1.25x2.91in(LxWxH).它还有手动和气动启动结构可供选择。

Ultra-high purity diaphragm valve

The flow control of slurry and aggressive fluids in semiconductor and clean-area applications is simplified by a new fluoropolymer diaphragm valve from the Partek operation of Parker Hannifin. Called the 20 Series, the valve features a flow path and valve seat area that optimizes fluid flow dynamics, for minimal pressure drop and enhanced flow rates, and resistance to aggressive media. As a result, the 20 Series valve offers a life of more than a million cycles in slurry applications. Compliant with the SEMI-F57-0301 standard for polymer components, Partek's new valve has a body machined from virgin 100% ultra-high purity PTFE for superior chemical resistance, and a one-piece, precision-machined diaphragm. It is available initially in three orifice sizes of 1/4, 1/2 and 1in, with port sizes ranging from 1/4 to 1-1/4in, and can be supplied with industry-standard Parflare or Nippon Pillar S300 end connections. The design of the valve is optimized to save critical clean room and sub-fab space; for example, the 1/4in version has a body size measuring 1.5 x 1.25 x 2.91in (L x W x H). Both manual and pneumatically actuated configurations are available.